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2014, Vol.43, No.3

373-375

Development of a Compact Scanning Transmission X-ray Microscope (STXM) at the Photon Factory

Yasuo Takeichi 1 , Nobuhito Inami 1 , Hiroki Suga 2 , Kanta Ono 1 , Yoshio Takahashi 2
1 Institute of Materials Structure Science, High-Energy Accelerator Research Organization (KEK)
2 Department of Earth and Planetary Systems Science, Hiroshima University
https://doi.org/10.1246/cl.130948

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Abstract
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We report a compact scanning transmission X-ray microscope (STXM) newly designed and developed at the Photon Factory. Piezo-driven linear stages are used for all of the coarse stages in the microscope to make the microscope compact, stable, and suitable for use at the endstations of multipurpose beamlines already in operation. Fully digitized control and detection electronics are implemented to realize efficient data acquisition. The performance of the STXM is demonstrated in both imaging and spectroscopic experiments.

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